Product Description

Product Overview
PECVD tube furnace consists of vacuum acquisition, flow control, and RF power supply.PECVD is obtained by vacuum, flow control, and radio frequency power supply. With 13.56Mhz radio frequency output, the gas containing the atoms of the film is ionized to form a plasma in the vacuum body. The strong chemical activity of the plasma is used to improve the reaction conditions and make the film composed of The gaseous substance undergoes a chemical reaction to realize a new preparation technology for the growth of thin film materials, and finally, a few pieces of the desired thin film are deposited, which is suitable for the deposition of SiO2 and SiNx thin films at 1200C.

  • CVD tube furnace system consists of tube furnace, vacuum acquisition, flow control, and radio frequency power supply
  • Tube furnace can choose different tube diameters and lengths of constant temperature zone. Both ends of the furnace tube are equipped with high vacuum stainless steel sealing flanges.
  • The vacuum acquisition system can choose different vacuum pumps according to the experimental requirements. The vacuum degree of the rotary vane mechanical vacuum pump is less than or equal to 5pa, and the vacuum degree of the molecular pump vacuum unit is 1×10-4pa.
  • Gas supply system can choose 3-way float manual and 3-way automatic mass flow system.
  • Vacuum measurement is digital in line with vacuum machine or Pirani vacuum gauge.
  • Select 13.56Mhz equipment power supply for plasma discharge, power output can choose 200W, 300W, and 500W.
  • Tube furnace can choose single temperature zone 300mm and 440mm, and can also choose three temperature zone or multiple temperature zone for temperature gradient experiment.
  • The built-in RS485 digital communication port and USB adapter of the thermostat are optional configurations, which can be connected to a PC for remote control and monitoring of the system, and the test results can also be saved or exported.
  • The product complies with EU CE standards.
Technical Parameters
Reactor Quartz Tube
Heating Zone Length
Furnace StructureAlumina Ceramic Chamber, Temperature control system, Heating element, Furnace shell, Main Electric Parts and other relative accessories
Max Temperature1200°C
Continue Temp.1100°C
Power Supply220V/1.8kW220V/1.8kW220V/2.6kW220V/2.6kW
Heating ElementHRE Resistance Wire
Chamber MaterialPolycrystalline Inorganic Alumina ceramic fiber material prepared by wet vacuum filtration molding
Temp Precision±1°C
ThermocoupleN type
Temp ControllerSHIMADEN (Japan) brand intelligent microcomputer PID controller can program 4 groups 32 segments
Electronic PartsFurnace temperature control integrated structure, furnace opening & closing, double shell, air circulation heat insulation
Heating Rate≤ 25°C/min ( suggest 15°C/min for longer life using of furnace )
Safety ProtectionOverheat and thermocouple-break alarm
CertificationISO9001 /CE/ SGS/TUV
Furnace ShellHigh quality cold-rolled steel sheets CNC processing
InsulationOptional 3-channel float manual flow meter, range 60-600m/min, 3-channels automatic mass flow meter, range 1 -500sccm
AccessoriesFrequenct: 13.56 Mhz ±0.005%, Power: 5-500W, Power Stability: ±0.5%
OptionalBoth ends of the flange are equipped with air intels and outles. The pressure gauge. The precision needle valve can adjust the short term and air output. It can pass in protective gases.

Tube Furnace >>

The Overview of Tube Furnace
Tube Furnace is a compact heating equipment widely used in so many fields like metallurgy, glass heat treatment, lithium battery, positive and negative electrolyte, abrasive tools and other industries. It is used to measure the structural state of materials at a certain temperature for small samples. It is generally used in colleges and universities, industrial and mining enterprises, research institutions, etc. Tube furnace also has the advantage of providing a vacuum and atmosphere working environment for heating easily with lower cost.
HRE Resistance Wire
N-Type Thermocouple
PID Temperature Control

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